Lam Research Introduces Groundbreaking Suite of Selective Etch Tools to Accelerate Chipmakers’ 3D Roadmaps
An engineer with a chamber for Lam Research's Selis®, a product in its selective etch portfolio. Selis uniquely employs both radical and thermal etch capabilities to enable ultra-high selective etching with uniform top to bottom process control without causing damage to the wafer structure.
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Lam Research Corporation