ASM completes development of SiGe processes for 300MM


BILTHOVEN, THE NETHERLANDS, October 4, 2000 - ASM International N.V. (Nasdaq: ASMI and AEX: ASM), announced today that its subsidiary ASM America has successfully completed the development of silicon-germanium (SiGe) processes for 300mm applications. Selective silicon-germanium epitaxial-growth as well as mixed epi-polysilicon germanium processes have been successfully demonstrated on the Epsilon E3000TM, its 300mm silicon epitaxial tool operating at reduced pressures (RP) and low temperatures. This confirms ASM's market leadership in low-temperature and silicon-germanium epitaxial processes.

Dr. Armand P. Ferro, ASM's Epitaxial Business Unit Manager stated, "This successful implementation of multiple silicon germanium processes on the new 300mm RP Epsilon is an important step in making our most advanced production processes available to our 300mm customers. SiGe epitaxy is primarily used for advanced high frequency device applications and now, with 300mm capability, ASM is able to better serve our customers' most sophisticated 300mm epitaxial needs."

ASM is a world-class supplier of single-wafer epitaxial tools and related semiconductor process equipment. ASM has been building and selling epitaxial reactors since 1987 and its Epsilon reactors are used in mass production by all major semiconductor device manufacturers and wafer suppliers worldwide.

About ASM


ASM International is headquartered in Bilthoven, the Netherlands. ASM International's subsidiaries design, develop, manufacture and market equipment and materials used to produce semiconductor devices. ASM International and its subsidiaries provide production solutions for the wafer processing, assembly and packaging segments of the semiconductor equipment market through their facilities in the United States, Europe, Japan and Asia. ASM International's common shares trade on the NASDAQ National Market and on the AEX Stock Exchange in Amsterdam under the symbol "ASM". More information on ASM can be found on its website at http://www.asm.com

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