Axcelis Lands High-Volume, Follow-On Order for Integra(TM) ES Plasma Dry Strip Systems From Major Foundry

Powerful Combination of Enabling, Advanced Processing Capabilities and High Productivity Outperforms Competition


BEVERLY, Mass., June 28, 2011 (GLOBE NEWSWIRE) -- Axcelis Technologies, Inc. (Nasdaq:ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that a major foundry has selected the IntegraTM ES plasma dry strip system to support their most advanced, high-volume device manufacturing facilities. The systems have started shipping this month to multiple fabs worldwide.

"We're excited to see the growing momentum for the Integra ES as customers see the wide range of technological capabilities and manufacturing benefits the product offers," noted Bill Bintz, executive vice president of marketing and engineering for Axcelis Technologies. He continued, "The Integra ES was selected for this project because of its significant performance advantages for non-oxidizing dry strip processes over ultra-shallow junctions and sensitive, exposed high-K and metal gate materials for 2Xnm processes. The Integra ES is the only product on the market capable of delivering enhanced device performance benefits with production-proven non-oxidizing processes, along with an innovative, modular, cluster design that provides chipmakers with unprecedented manufacturing flexibility and speed. This unique combination makes it ideally suited for a high-volume foundry manufacturing environment."

Axcelis is a recognized leader in FEOL and BEOL plasma cleaning and dry strip technology. The Company's systems are known worldwide for providing innovative process solutions, exceptional reliability and low cost of ownership. Axcelis' dry strip cleaning product portfolio includes the Integra RS and ES systems as well as the RapidstripTM 320 and 210 systems. Together, these products deliver highly differentiated plasma cleaning technology to meet the full range of customer needs, from the highest productivity, non-oxidizing solutions for 32nm and below, to single chamber, small substrate size applications in the MEMS, LED, and packaging markets.

Axcelis Technologies, Inc. (Nasdaq:ACLS) headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation and cleaning systems. The company's Internet address is: www.axcelis.com.


            

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