BEVERLY, Mass., July 11, 2011 (GLOBE NEWSWIRE) -- Axcelis Technologies, Inc. (Nasdaq:ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today the introduction of the new Optima MDxtTM medium current implanter. The new system's innovative, proprietary design brings unmatched levels of productivity and purity across the broadest range of medium current implant applications, for optimized manufacturing flexibility and capital efficiency.
Bill Bintz, executive vice president of engineering and marketing commented, "The new Optima MDxt is the result of a significant design effort to provide chipmakers with a flexible medium current implanter that significantly reduces their operating costs, while simultaneously delivering powerful, enabling technology necessary to meet critical requirements for the complex chip designs that require low power and high performance. As customers move towards more advanced device nodes, mid dose implant becomes an increasingly important process step, with system flexibility in production becoming a critical factor in tool selection." He continued, "With the introduction of the Optima MDxt, Axcelis is now positioned to take advantage of new growth opportunities in the second largest implant segment. We are very excited about this innovative new technology, and the potential it offers customers to more quickly meet the needs of emerging market trends."
The Optima MDxt
The new Optima MDxt medium current system utilizes Axcelis' superior beam line technology coupled with a production proven, 500 WPH single wafer platform. This combination provides chip manufacturers with remarkable precision and productivity for the widest array (0.5keV - 1MeV) of low energy and mid dose applications, especially well channel and HALO processes. In addition, the Optima MDxt's industry leading energy range and beam currents enable it to be utilized for implant processes traditionally run on high energy or high current implanters, allowing for maximum tool utilization. The Optima MDxt beam line design utilizes Axcelis' patented angular energy filter and constant focal length ion scanning eliminating all forms of energy contamination and ensuring superior total angle control. The result is an exceptionally pure and precise implant, and the highest yield in production. In addition, the Optima MDxt has been holistically architected for 'green operation' – with a special emphasis on low power consumption, high reliability and the lowest total operation costs. For more information on the product, including an animation of its high throughput capability, please visit:
http://www.axcelis.com/products/ion-implant/mid_current/optima-mdxt
The Optima MDxt is an extension of the company's successful Optima Series of ion implanters, designed to provide customers with a total solution for their implant needs. The single wafer platform also includes the Optima HDx for high dose applications, and the Optima XEx for high energy applications.
Axcelis Technologies, Inc. (Nasdaq:ACLS) headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation and cleaning systems. For more information, visit the company's website at: www.axcelis.com.